抄録
In this paper, structure-shaping process on a thin glass plate surface was studied by using pulsed CO_2 laser irradiation. A plano-convex lens of Zinc-selenide focused the laser beam into the diameter of 390μm. Humped lens-like surface that had 442μm diameter and 12.9μm height was obtained by on laser pulse of 10W power and 30ms duration. Because material abrasion started to occur with extending the pulse duration, laser pulse of 100ms duration formed bored surface on the glass plate surface and it had a few tens microns depth. In this case, certain amount of abrasive was piled up around the hole, and boring quality of the hole was poor. Comparison of the experimental results and the numerical simulation results of unsteady heat transfer showed that approximate starting temperature of the surface deformation and abrasion of the used glass were 1400℃ and 3500℃, respectively.
