素材物性学雑誌
Online ISSN : 1884-6610
Print ISSN : 0919-9853
ISSN-L : 0919-9853
Colloidal Silica添加電解液および陰極のPre-Coatingによる銅電着層の組織変化
鄭 性式李 相伯金 永根金 柄日後藤 正治
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2003 年 16 巻 2 号 p. 60-66

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This study examined changes in the crystal structure, the surface morphology and the crystal orientation of electrodeposited film that is extracted from the negative electrode using Au pre-coating and the dispersed plating method that adds colloidal silica (SiO2 suspension) as a dispersant to a copper sulfate electrolytic bath. Because of silica dispersion and Au pre-coating, the crystal particles on the film became fine and made uniform, and the number of particles also increased. In addition, the hardness of copper electrodeposited film rose by around 15% because of the dispersion effect of colloidal silica. Furthermore, planes (111), (200) and (311) of X-ray diffraction pattern on the copper electrodeposited film that dispersed colloidal silica almost disappeared, so the preferred orientation changed from plane (111) to (110).
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