The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2004
Session ID : 2A1-L1-67
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A Micro Ultrasonic Motor using Micro-machined Cylindrical Bulk Piezoelectric Vibrator : 2nd report: Miniaturization and Performance Evaluation of A Micro Ultrasonic Motor
A Makino, T Kanda, Koichi S, Takeshi M, M Kurosawa
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© 2004 The Japan Society of Mechanical Engineers
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