Abstract
We have proposed the tailor-made multilayer piezoelectric actuator (TAMPA) with large displacement and large force. The TAMPA has the layered structure of two bimorph-type piezoelectric elements combined by both ends supported. Therefore, the performance of TAMPA is affected by the shape and the stiffness of support. It is necessary to design the optimum structure of support of TAMPA. This paper proposes four-point supported structure because of the plate shape of bimorph-type piezoelectric elements. And the effect of the shape of supports is estimated through finite element analysis of TAMPA constructed by four-point support of varied sizes. TAMPA having the optimum structure determined from estimation result is produced and its performance is evaluated. For production, the mold made by rapid prototyping is utilized. It is possible to produce the support which had arbitrary shape by using this mold.
