Abstract
The purpose of this research is to develop hi-speed and hi-accuracy machining system which is corresponded to 1 micron of accuracy. The servo data is the set of position command at every servo cycle time, which is minimum unit of position command in NC machining processes. The servo data is directly generated by geometric model interpolation process without NC program. In geometric model interpolation process, line, arc and spline curve are used as the geometric elements to generate servo data. Then motion errors are simulated and compensated to servo data. These methods are implemented and compared feed rate and accuracy with current system. As a result, it is evident that proposed system is able to control the tool machine with high accuracy.