2A2-K12 静電駆動を用いたマイクロスクリューポンプの開発

抄録

A micro pump is an essential component in μ-TAS (Micro Total Analysis System). However, miniaturization of the micro pump is difficult because it has power source; therefore, it is less developed compared with other components of μ-TAS. In this paper, we propose a novel micro screw pump driven by electrostatic force. The micro screw pump has an advantage such as no generation of a pulsation flow. In addition, it uses electrostatic force to drive which might be effective for micro actuation. As a primary stage of development, we confirm in this study a basic principle of electrostatic driving and characterize a prototype. The results show the principle of electrostatic driving is effective for a micro screw pump.