抄録
We propose a novel type of micromachines driven by light-induced dielectrophoresis. The optoelectronic driving system consists of an upper photoconductive layer of amorphous silicon on an indium tin oxide (ITO)-coated glass substrate and a lower transparent, conductive ITO-coated glass substrate. Micromachines are fabricated on the lower ITO-coated substrate by two-photon microstereolithography. To optimize the driving condition, we examined the movement of microparticles by focusing a laser beam. Micromachines such as manipulators and micro-rotor were successfully driven at the optimal condition. The optoelectronic micromachines will be applied to high-performance, low-cost lab-on-a chip devices.
