ロボティクス・メカトロニクス講演会講演概要集
Online ISSN : 2424-3124
セッションID: 2A1-G14
会議情報
2A1-G14 2光子造形による光電駆動マイクロシステムの開発
吉村 直樹丸尾 昭二
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会議録・要旨集 フリー

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We propose a novel type of micromachines driven by light-induced dielectrophoresis. The optoelectronic driving system consists of an upper photoconductive layer of amorphous silicon on an indium tin oxide (ITO)-coated glass substrate and a lower transparent, conductive ITO-coated glass substrate. Micromachines are fabricated on the lower ITO-coated substrate by two-photon microstereolithography. To optimize the driving condition, we examined the movement of microparticles by focusing a laser beam. Micromachines such as manipulators and micro-rotor were successfully driven at the optimal condition. The optoelectronic micromachines will be applied to high-performance, low-cost lab-on-a chip devices.
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© 2010 一般社団法人 日本機械学会
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