Abstract
This paper presents the comprehensive analysis of fluid force, the optimum design and its fabrication to reduce the fluid force on the magnetically driven microtool (MMT) by attaching riblet shape on the MMT. Ni and SU-8 composite fabrication is employed to form three-dimensional shape on the Ni-MMT. The evaluation experiments show the effectiveness of the riblet surface for the positioning accuracy, especially in the case of high speed actuation. In addition, since the MMT is covered by SU-8, which is biocompatible, it can be applied to cell manipulation without harm.
