Abstract
In this paper, we propose the on-chip capacitive force sensor for ultrahigh speed cellular force measurement. In order to apply the capacitive force sensor to microfluidic chip, on-chip force sensor utilizes the air-liquid interface due to isolate liquid form comb electrodes. We have designed and fabricated the capacitive force sensor with cell culture chamber as a kind of microchannel to the several pm order cell. Air-liquid interface between the force sensor tip and comb electrodes have achieved. As a result, we have succeeded in measurement of capacitance of on-chip force sensor as a function of displacement of probe tip in wet condition.
