Abstract
This paper presents cellular force measurement in a microfuluidic chip. We employed magnetically driven on-chip probe with displacement reduction mechanism to obtain nanometric positioning of probe with mN order force. This mechanism utilizes the serially-connected springs with different stiffness and is driven by magnetic force. The standard deviation of displacement of probe tip was under 0.18 μm. Moreover we have succeeded in on-chip deformation of the 100 μm order cell. The manipulation power was estimated to 0.42 mN. We have succeeded in 100 nm order non-contact actuation of on-chip probe with a power of 0.1 mN order. Finally, we have demonstrated on-chip cellular force measurement.
