1A1-O04 インチワーム機構の内力切り替え用磁気アクチュエータの開発と非磁性体面上での駆動実験(ナノ・マイクロ作業システム)

抄録

In this paper, we have reported that design and dynamic analysis of a 3 DOF mobile mechanism which moves on a table made by non-magnetic materials. Previous mechanism has a pair of Y-shaped electromagnets and six piezoelectric actuators. This mechanism runs on working table which is made by special ferromagnetic alloy, such as 3% silicon steel. In the mechanism, two horseshoe-shaped electromagnets and the table make a closed magnetic circuit to fix the ferromagnetic surface. However, we need high processing cost to polish the table. In this paper, we have developed the mechanism with solenoid actuators to make mechanism move on a table made by non-magnetic material. Design procedure, dynamic analysis, and chip mounting application are also discussed to cultivate the flexible, low-inertia, compact, and omnidirectional precise positioning.