Abstract
The purpose of this study is development of the high efficiency pneumatic system using small flow control valve. The control valve has small size, lightweight and can control air flow continuously. We aim at the precise flow control. In this repot, we report the vibrational condition for precise flow control. We discovered two high efficiency vibrational modes by the finite element method. We have measured vibrational condition and flow rate characteristics. From these result, we conclude that the tolerance of air pressure is most important parameter at optimum vibrational condition.