抄録
One is contact force sensation and others are vibration methods in researches of tactile display. Vibration methods are suit for slip sense. Contact force sensation is not suit for wearable display. Therefore, we use MEMS technology to represent high-density stimuli. We improved the layout of cantilever actuator and confirmed performance of actuator using FEM analysis. We also developed optimal sputter condition of PZT film deposition. We confirmed major crystallization of PZT by XRD and suitable atomic element weight percent by X-ray Fluorescence Analysis.
