静電チャックデバイスを有するタコの吸盤を模倣した吸着グリッパの試作

抄録

This paper described the vacuum gripper combined with electrostatic adhesion. We evaluated the electrostatic chuck using the fabrication method of MEMS. When the applied voltage was 2.4 kV, the fabricated electrostatic chuck can grasp a paper (80 mg). The adhesion force per unit area was 7.8 Pa. We first tried to fabricate the vacuum gripper with flexible electrostatic chuck. This gripper can grasp the paper (6 mg, 100 mm²) when the applied voltage was 1.6 kV.