スマートマニピュレーション制御のための近接触覚複合MEMSセンサ

抄録

In this Paper, we report the proximity and tactile combination MEMS sensor for controlling manipulation of delicate objects. This sensor can detect proximity of the object by the internal photoelectric effect in Si substrate. And normal and shear loads as tactile information are also detectable by deflection of three cantilevers fabricated on the substrate surface and embedded in the silicone elastomer. The sensor is attached on the electromotive actuator and the sensor outputs are obtained during grip of the target object. The proximity output depends on distance to the target object. On the other hand, the tactile output depends on normal load applied by gripping the object. Furthermore, it is demonstrated that slipping of the gripping object can be detected by the tactile output. Therefore, gripping force can be controlled by monitoring of the sensor output.