レーザー誘起マイクロバブルによるマイクロマシンの駆動と制御

抄録

In this study, we have realized the control of a microrotor using the convection flow around a laser-induced microbubble. To examine the rotation of the microrotor, the temperature distribution and the convection flow around the microbubble were analyzed by finite element analysis. As a result, it was found that the flow direction depended on the position of a microbubble. This phenomenon makes it possible to control the rotational direction of the microrotor. In experiments, a microrotor and two thin plates were fabricated on a glass substrate by two-photon microstereolithography and subsequent electroless copper plating. It was demonstrated that the rotational direction of the microroter was switched by changing the position of the laser-induced bubble. The bubble-driven micromachines will be useful for microfluidic devices such as micropumps and micromixers.