青色半導体レーザーを用いた内部硬化型マイクロ光造形法の開発とナノインプリントへの応用

抄録

In this study, a versatile microstereolithography system using a low-cost blue diode laser was developed. This system enables to generate pinpoint photopolymerization at a focused spot inside a liquid photopolymer like two-photon microfabrication using a femtosecond pulsed laser. It can provide multiscale fabrication owing to the unique property of single-photon polymerization. A microstereolithograpy system using a 405 nm diode laser and galvano-scanner set was constructed. After investigating a suitable photopolymer by absorbance measurement, the fabrication resolution of this system was examined in experiments. In addition, three-dimensional (3D) microstructures including micro lattice models and movable microparts were successfully fabricated. Moreover, additive fabrication of 3D microstructures on patterned films produced by nanoimprinting was demonstrated.