ロール型転写技術における転写位置ずれ低減のための微小突起構造

抄録

We proposed convex microstructures on integrated substrate of roll-type stamping transfer in order to improve a transfer positioning accuracy. Stamping transfer is one of the integration methods of small parts to a flexible substrate. It is, however, difficult to achieve high transfer positioning accuracy on roll-type stamping transfer. Transfer positioning accuracy is depended on a shear stress at the transfer, therefore we provided the surface of flexible substrate with the convex microstructures to decrease the shear stress. In this paper, we integrated the small parts to a flexible substrate using a roll-type stamping transfer system and evaluated the misalignment angle as a transfer positioning accuracy. As a result, we could improve the misalignment angle by using soft convex microstructures.