マイクロ超音波モータの視覚フィードバックに関する研究

抄録

Robot manipulators are used in various manufacturing industries, and their application has been extend to the microscope field in recent years. The microrobot manupulator can manupulate micro objects that are diffucult to execute with human hands. However, in the present situation, the application is limited to scenes that are simple and require no force because of insufficient power of the actuator as the drive source. In this study, we developed a compact ultrasonic motor using piezoelectric effect. In addtion, position control was performed on the ultrasonic motor by using visual feedback with a high speed camera.