マイクロ超音波モータの高トルク化に関する研究

抄録

We propose a miniature micro motor using the stator that is a metallic cube with a side length of one millimeter. The proposed motor uses a three-wave mode generated around the circumference of its hole, unlike bending vibration modes that are often used in existing miniature ultrasonic motors. This idea have made the fabrication easier and the stator smaller. In this paper, we propose the smallest preload generation mechanisms that provide force between the rotor. Two kinds of preload mechanisms, preloads in the axial and radial directions, are examined by prototype. The motor performance with both mechanisms is evaluated in experiments.