マイクロEHDポンプにおける印加電界の非対称性の研究

抄録

In recent years, miniaturization of mechanical elements is interesting with improving machine function. If mechanical elements are miniaturized as the simple method, it is expected that physical and mechanical limitations exist. Therefore, researchers have been studying effective actuators and sensors in a minute space. Recent study of micro-actuators without mechanical elements is getting much attention especially on “chemical actuators” without mechanical elements. For the present study we focused on Electro-Hydro-Dynamic: EHD as chemical actuators. The functions of EHD are driven when the high electric field is applied to dielectric fluid. The development of micro-EHD pump was carried out which has a simple structure and easy to manufacture. This micro-EHD pump has little loss in terms of both of fluid effect and electro-chemical effect.