扁平型マイクロ超音波モータを用いた2リンク機構の開発

抄録

We propose a miniature flat ultrasonic motor using the stator that is a metallic flat cuboid. The proposed motor uses a three-wave mode generated around the circumference of its hole, unlike bending vibration modes that are often used in existing miniature ultrasonic motors. The use of this vibration mode can make the stator smaller and flatter. In this paper, we build the micro-flat ultrasonic motors and evaluate the motor motion, such as the torque and angular velocity. The link mechanism using the two micro-flat ultrasonic motors are demonstrated.