真空封止技術による水晶振動式荷重センサの計測レンジ拡大

抄録

Monitoring of biosignals plays important role in health and safe management in daily life. We have developed wide range load sensor based quartz crystal resonator (QCR load sensor) for casual sensing of biosignals. Expansion of the measurement range of the sensor is required for enhancing the usage of the QCR load sensor as casual sensing. We proposed sensor fabrication using vacuum sealing technique for expansion of the measurement range. The sensor fabricated by resist bonding had a measurement range of 0.27 mN - 1180 N, and the measurement range was improved compared with conventional sensor. Proposed sensor has wider dynamic-range compared with commercial product. Eventually, multiple biosignals detection of pulse and weight is successfully achieved with proposed QCR load sensor.