MEMS差圧センサ素子を用いた球型二次元風向風速センサ

抄録

In recent years, drone technology has been dramatically developed, and agriculture, infrastructure, and delivery are one of the applications. It is desired to measure airflow condition during drone maneuvering from a viewpoint of safety. Here we propose a sphere shaped two dimensional (2D) airflow sensor with Microelectromechanical systems (MEMS) differential pressure (DP) sensors that can be attached to a drone. The sensor size and weight are sufficiently small and light, respectively. On the surface of the sphere, there are some inlets which give differential pressure to DP sensors located inside of the sphere structure. From the differential pressures detected by the DP sensors, airflow velocity and direction are measured. In this paper, we designed and fabricated a 2D airflow sensor, and investigated the response of the fabricated sensor.