金属片持ち梁の歪計測に基づくプラズモニック光検出器の入射角特性評価

抄録

This paper reports a measurement system for angle-of-incidence characteristics of a plasmonic photodetector using a strain gauge on a metal cantilever. The photodetector is installed on the metal cantilever equipped with the strain gauge at the root of the cantilever. By deforming the cantilever, the angle of incidence of the photodetector was scanned. This angle of incidence was calculated by measuring the strain on the metal cantilever. The photocurrent signal from the photodetector and the strain signal from the strain gauge were simultaneously measured using an oscilloscope while the cantilever was being deformed. The simultaneous measurement of the two signals produced similar result to the one obtained by a conventional measurement using a rotating stage, indicating that the proposed structure is capable of simultaneous measurement of photocurrent and angle of incidence.