円筒型ハイダイナミックレンジ6軸力覚センサの開発

抄録

In this study, a cylindrical 6-axis Force/Torque(F/T) sensor using two types of strain gauges is proposed to have a High Dynamic Range(HDR) and a small nonlinearity error. By strategically attaching strain gages to the surface of the cylinder, it is possible to measure forces and torques in 6-axis. Small loads are measured by semiconductor strain gauges, while large loads are measured by metal foil strain gages, thus enabling HDR measurements. The performance evaluation of the actually fabricated cylindrical HDR force sensors showed that the semiconductor strain gages have a maximum nonlinear error of 5.4 % and the metal foil strain gages have a maximum nonlinear error of 3.9 %. In comparison with the signal-to-noise ratio, the sensor can detect 0.035 N for Fx and 0.485 N for Fz.