斜立したLIGカンチレバーを用いた二軸触覚センサ

抄録

This paper describes a biaxial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The proposed sensor has standing LIG cantilevers as a sensing element in an elastic body. When the force is applied to the sensor, the cantilevers deform and the resistance of the LIG on the cantilever surface is changed. Since the cantilever shows different resistance changes depending on the direction of deformation, the biaxial force can be measured independently. The proposed sensing element was formed by properly irradiating two types of laser. In addition, the cantilevers were formed on a flexible polyimide (PI) film; thus, the cantilevers maintained the standing position by thermoplastic deformation. These fabrication processes were simple and highly repeatable. As a result, the fabricated biaxial tactile sensor measured normal and shear force with high independence.