低次振動モードで駆動する薄型超音波モータの試作

抄録

In this study, we have designed and evaluated a thin ultrasonic motor with a stator having dimensions of 4.5 mm in width, 4.5 mm in depth, and 1.1 mm in thickness. The proposed ultrasonic motor is actuated by the bending vibration of a flat plate that can be excited at low frequencies. The simple stator construction allows the stator to be assembled and machined without the need for specialized equipment. The characteristics of the prototype ultrasonic motor, such as torque and rotational speed, are evaluated through experiments.