ナノスケールのゲルロボット作製に向けたナノインプリントプロセスの検討

抄録

We evaluated nanoimprint lithography (NIL) for the fabrication of nanoscale gel robots. In recent years, microrobots have attracted attention because they can be used for micromanipulation. Our group has proposed microgel robots made of thermoresponsive hydrogel that can be assembled and disassembled. However, it is difficult to fabricate those microgel robots in the size of several micrometers that enable us to manipulate cells by previous fabrication process using photolithography. In this paper, we fabricate gel patterns using NIL and investigate its potential for the fabrication of nanoscale gel robots. We succeeded in fabricating an 80 μm circular patterns by NIL.