超音波振動子と対向子を用いたポンプの液体への適用

―第3報 対向子予圧の検討―

抄録

Ultrasonic pumps are expected to have an extended service life and be applicable in high magnetic field environments. In this study, we aimed to enhance the performance of liquid ultrasonic pump by employing the opposing block. Specifically, we investigated two approaches: modifying the shape of the opposing block and adjusting the gap between the transducer and the opposing block. Regarding the modification of the opposing block shape, we fabricated opposing block with an exponential curve and achieved higher pump performance than that of the tapered opposing block, which had demonstrated the highest pump performance in previous study. In terms of gap adjustment, our experiments demonstrated that smaller gap improves pump performance. Furthermore, it was experimentally clarified that preloading the opposing block and further reducing the gap led to an additional improvement in pump performance.