抄録
To determine the temperature field in an induction heated crucible is of great importance for studying the crystal growth process in the Czochralski system. For this purpose, experiments were carried out under different induction RF currents to study the temperature distribution in the graphite crucible in a Czochralski furnace. Corresponding numerical calculations were also performed and the numerical results agreed well with experimental ones. It can be found that besides radiation, the natural convective and conductive heat transfer inside the furnace also play important roles to the temperature distribution of the crucible.
