ナノ熱線センサーの製作と応用(オーガナイズドセッション9 マイクロマシン/電子デバイスにおける伝熱問題)
詳細
Nano heater sensor is developed in order to improve fluidic devices. Our nano heater sensor has three metal thin wires. Each thin wire is of a few hundred nanometers. By means of forming a trench that is no more than a micrometer in width, heat loss from thin lines to silicon substrate is reduced. Consequently nano heating or sensing works only on the trench. The feasibility of this nano heater sensor is treated by theoretical analysis and test devices are fabricated using NEMS (Nano Electro Mechanical Systems) technology represented by electron beam lithography, lift-off patterning and isotropic and anisotropic etching.
