抄録
To produce a durable display, it is necessary to know the damage of an transparent conductive film from heat. Thermal diffusivity is an important thermophysical property to evaluate the damage. In this study, we used the forced Rayleigh scattering method to measure the in-plane thermal diffusivity of tin doped indium oxide (ITO) thin films with thickness of 125, 174 and 376nm. The ITO films on PET (polyethylene terephthalate) substrate were made by the ion plating technique. From the measurement results, it is confirmed that ITO thin films have a size effect on in-plane thermal diffusivity. Additionally, we found the anisotropic characteristics with the ITO thin films.
