抄録
Solar energy is capturing the spotlight as clean energy replaced with atomic energy. Then, we paid attention to the thin film silicon solar cell with low manufacture cost. It is usually manufactured by PECVD under low back pressure. We found that high-speed film deposition was enabled by increasing back pressure. However, high back pressure is put into the domain of a viscous flow, and produces involvement of clusters. The film quality will be worsened if a cluster adheres to a substrate. In order to attain a high quality and high deposition rate, it is necessary to investigate the dependence between the back pressure and deposition quality, and the relation between the back pressure and deposition rate. This paper reports the experimental results.
