抄録
Recent requirements for semiconductor equipment and robots that can proceed in their tasks without returning to a starting point have increased the demand for absolute encoders, including higher resolution and longer scale. This paper deals with the development of a high-resolution, long-range absolute linear encoder. To obtain the absolute position this encoder combines three signals : 1) the M-code signal, based on the 9-bit M-code; 2) the Gray-code signal, based on the 4-bit Gray code; and 3) the interpolation of data of sinusoid waves by the grating. This absolute linear encoder achieves an accuracy of 0.16μm and 1m detection range.
