精密工学会誌論文集
Online ISSN : 1881-8722
Print ISSN : 1348-8724
ISSN-L : 1348-8716
論文
機台振動の抑制を図ったリニアモータ駆動テーブルの高速位置決め制御
山本 暁洋宮河 秀和浜松 弘後藤 聡中村 政俊
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2004 年 70 巻 5 号 p. 645-650

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Driving table of a mechatronics device equipped with a linear motor driving mechanism is affected by thrust at high acceleration and deceleration. The reactive force of the thrust exerted on the stator and the base supporting the stator causes vibration. This vibration has an influence on the prolonged positioning time of the control system. To solve this problem, this paper describes about a control algorithm that suppresses base vibration and achieves high-speed positioning. The proposed control method consists of the response filter and the base vibration suppression controller based on the base vibration model, and constructs 2-degree-of-freedom controller. A remarkable improvement in performance can be observed in the experimental results.

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© 2004 公益社団法人 精密工学会
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