回折光プローブによる 6自由度位置姿勢計測

抄録

In this paper, we proposed a six-degree-of-freedom (6-DOF) measurement technology using the first order diffracted light as optical probe which is called “diffracted light probe”. The position of the diffracted light probe which is detected by the CCD camera changes according to the position and attitude of the grating. So, by calculating the optical axis of diffracted light probe, we can know the position and attitude of the grating simultaneously. In this method, the intensity distribution of the diffracted light affects the measuring accuracy. So, we established the design procedure based on the grating equation and by using the annular filter. Based on this procedure, we formed the grating (width of slit: 2μm, span of slits: 10μm, number of slits: 20). In addition, we formed the annular filter whose gap is 200μm by RIE-ICP.
By introducing these products into the optical system, we could obtain the diffracted light probe for the high precision measurement and verified the principle of this proposed method with the good results (position accuracy: 8μm, attitude accuracy: 0.2deg.).