抄録
An electron collision cross section data base for low temperature plasmas is strongly, needed in various fields of plasma technologies such as gas insulation, discharge lamp, plasma processing for etching and deposition, pollution control using plasma and others. This article reports the current state of electron and ion collision physics, and describes a self-consistent set of gases needed for modeling plasma devices based on the technical report “Electron Collision Cross Section Data Base for Low Temperature Plasma” published by The Institute of Electrical Engineering of Japan.
