プラズマ・核融合学会誌
Print ISSN : 0918-7928
講座
真空装置のガス放出特性(I)
赤石 憲也
著者情報
ジャーナル フリー

2003 年 79 巻 5 号 p. 518-523

詳細
抄録
This article is a lecture on vacuum technique. The discussion matter is outgassing characteristics of water vapor and hydrogen in a vacuum chamber. The role of surface treatment of vacuum chamber is also mentioned from the view of reduction of outgassing rate.
著者関連情報
© 2003 by The Japan Society of Plasma Science and Nuclear Fusion Research (Japanese)
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