表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
AFMによる絶縁性粉体の表面形状観察
中野 寧杉山 和夫竹内 康松田 常雄
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ジャーナル フリー

1993 年 14 巻 6 号 p. 342-346

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A new method for the observation of surface morphology of insulating ceramic powders by means of atomic force microscopy (AFM) has been proposed. Several parameters for the measurements, such as the fixation methods of powders on a steel holder, the removing effect of static electricity and the influence of scan rates in AFM operation were examined. The quality of AFM images depended on how the powders were supported. In particular, a clear image was obtained when the powder was rigidly fixed on the holder by use of commercially available epoxy-type adhesives having Shore hardness values of 85 or above. Removal of static electricity by the combined use of an ion-blower and a conductive tip and also by slow-moving scanning of a probe led to a better clarity of the image. A detailed surface morphology (30nm × 3Onm) of silica fine powder could be obtained with a high resolution under the optimized operative conditions for AFM observation.

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© 社団法人 日本表面科学会
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