マイクロ・スパッタリングによるコーティングガラスリペア装置の開発

抄録

We have developed a handy, portable repair equipment using by micro-sputtering method, so that we can easily repair defects on coated glasses without removing them from the frame. This repair equipment is made up of a micro-sputtering apparatus to repair defects and a control unit to control the vacuum and electric system.