A short review of surface chemical analysis by Auger Electron Spectroscopy is presented. Following a brief ntroduction of the basis of quantification in AES, each of the Auger parameters causing inaccuracies in measurements is discussed. These include both specimen and instrument dependent parameters. A result of a round robin involving relative intensity measurements on high purity samples of copper and gold is referred to. Causes of the spread in the relative intensities are considered. The importance of the instrument dependent parameters is discussed. The need for standards (e.g., calibration methods, operating procedures, and data analysis) is emphasized to ensure that data of known accuracy can be obtained routinely. Recent trends and developments in quantification are given.
