Quantitative analysis by electron probe microanalyzer has been well studied and established. Many methods of quantitative analysis are provided. 1. Working curve method, 2. ZAF method and 3. Bence-Albee method are well known and used. But these methods are not suited to some specimens. 4. Convergence method and 5. SEF method are convenient and are suited for all kinds of specimens. A new ZAF method is introduced. This method is very accurate for light elements, such as oxide, nitride, etc., and can be used for some specimens which have an undetectable element.
Quantitative analysis methods on thin films, small particles and sintered specimens are presented, too.
