ガスが吸着した固体表面とマイクロ波との相互作用
1987 年 8 巻 6 号 p. 511-517
詳細
1987 年 8 巻 6 号 p. 511-517
It has been experimentally demonstrated that the injection of 2.45GHz microwave power into an evacuated vacuum vessel promotes outgassing from the wall. The mechanisms of the interaction between gas-adsorbed surface and microwave are discussed from the experimental results on outgassing characteristics. The increment of gas desorption rate by microwave injection is considered to be due to the dielectric heating of adsorbed H2O molecules having a permanent dipole moment, surface heating by an induced current in the surface skin depth, and micro-discharges which occured near the wall surface.
