442医療用X線フラットパネル検出器

抄録

We have developed a new flat panel detector (FPD), known as LANMIT (Large Area New MIS sensor & TFT). This sensor in based on a thin film transistor (TFT) / metal insulator semiconductor (MIS) photoelectric converter array made using hydrogenerated amorphous silicon (a-Si). The sensor consists of 2688 * 2688 pixels with a pitch of 160 μm, giving an active imaging area of 17inch*17inch (43cm * 43cm). Optical photons generated by x-ray interactions with scintillator coating are detected by the MIS-type photoelectric converters, and the resulting signal is read out by switching the TFTs. LANMIT benefits from a very low level of noise, and a dynamic range which covers most of the exposure range used in radiology. Resolution (MTF) is appropriate for digital chest radiology, and the detector provides good contrast x-ray images. The simple fabrication process of this sensor promises high productivity and therefore a low cost flat panel detector.