443産業用高エネルギーX線CTとその応用

抄録

A high energy industrial X-ray computed tomography system using silicon semiconductor detectors (Si-SSD) and electron linear accelerator (LINAC) was developed to obtain high resolution 3D images of high density and large scale object. To increase photon sensitivity, detector elements were placed parallel to the X-ray beams. The obtained sensitivity of 20% for X-ray of 3MeV was 3×10⁴ times higher than that of X-ray films. It was clarified that the photon sensitivity of X-ray detectors restricts the performance of high energy X-ray CT, and it is shown that a CT image of 200mm thick iron object can be obtained with 0.2mm space resolution.