抄録
The mechanical properties of diamond-like carbon (DLC) thin films on SUS304 substrate have been studied. DLC thin films were prepared by the ion beam assisted deposition method. In this method, He+ ion irradiation was carried out in a C2H4 gas atmosphere. He+ ions were accelerated at an energy of 15 keV, and the ion beam current densities were changed from 10 to 100 μA/cm2. Atomic concentration and structure of the films were investigated by X-ray photoelectron spectroscopy and Raman spectroscopy. The mechanical properties of hardness and friction coefficient were determined using the Knoop hardness tester and the pin-on-disk tribometer.
The DLC thin films had amorphous structure that composed chiefly of graphite and disorder of graphite states. The Knoop hardness of the films increased with increasing He+ ion current density, and the film prepared at a current density of 80 μA/cm2 showed the maximum Knoop hardness value of 890 kgf/cm2. The friction coefficient of the film prepared at a current density of 60 μA/cm2 indicated lower value than that of the other current densities. From these results, it was cleared that the mechanical properties and structure of DLC thin films were greatly affected by the He+ ion beam current density.
