抄録
Helicon wave excited plasma (HWP) controlled by magnetic mirrors was applied to sputtering growth of a thin yttria-stabilized zirconia (YSZ) electrolyte film with solid oxide fuel cell (SOFC). Electron energy increased as increasing mirror field coil current from 4 to 15 A and its maximum value obtained at mirror field by coil current of 15 A. Furthermore, XRD intensity of (111) cubic system of a sputtered YSZ film also increased by adding magnetic mirrors. As a result, it was found that energy property of HWP and crystal structures of a sputtered YSZ film could be improved largely by reduction of particle energy losses due to the plasma confinement effect of magnetic mirrors.
