真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
イオンビームスパッタ蒸着を利用して作製した走査型電子顕微鏡用LaB6コーティングカソードの研究
北條 喜一塚本 哲生軍司 俊彦金谷 光一
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1981 年 24 巻 11 号 p. 594-599

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抄録
This paper describes an experimental inverstigation of the thermionic emission properties of tungsten hairpin filament coated with lanthanum hexaboride films (LaB6) by meams of ion beam sputter deposition method.
Measurement of brightness of the coated filament was parformed in a scanning electron microscope. As a result, the brightness of about 3.42×104 A/cm2·ster. (20 kV), was obtained by LaB6 coated tungsten hairpin filament.
Furthermore, it was found that resolution measured from the intervals between latexes obtained by S-450 (SEM) with LaB6 coated was about 20 nm.
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