窒化ホウ素・銅混合コーティング膜のナノトライボロジー特性
2003 年 46 巻 6 号 p. 509-511
詳細
2003 年 46 巻 6 号 p. 509-511
Boron nitride-copper complex films were synthesized on stainless steel substrates by magnetron co-sputter depositon method. Internal stress was observed with film deflection method. Surface topographical image and nanotribological property were measured by atomic force microscopy and lateral force microscopy, respectively. Nano aggregates grew on the film surface after annealing at 473 K in a vacuum, which is triggerd by internal stress. Frictional property of the films were drastically changed with the temperature of heat treatment in a vacuum. Friction coefficients as low as 0.1 under a vacuum condition were achieved after annealing at 673 K.
